Yuki Kato, Koryo Masuzawa, Takayuki Harada, Hideto Miyake, Atsushi Kobayashi. "Phase-selective sputter epitaxy of δ -NbN, γ -Nb4N3, and β -Nb2N on atomically flat AlN." Journal of Applied Physics, 2026. doi:10.1063/5.0311297