Pasikatan, E., Antonelli, G. A., Keller, N., Kuhn, M., Murakami, S., Kal, S., Rednor, M., Tapily, K., Hetzer, D., Schaefer, M., Musick, K., Diebold, A. C. (2025). Non-destructive lateral cavity etch measurements of 8-superlattice layer nanowire test structures using optical Mueller matrix spectroscopic ellipsometry, x-ray diffraction, and x-ray fluorescence. Journal of Applied Physics. https://doi.org/10.1063/5.0285160