Yongyong Che, Mingjian Zhong, Jianbin Liu, Keyuan Ding, Hao Liu, Jiatao Xie, Qianqian Qin, Minglong Liu, Peixu Liu, Xiaoyan Wei, Xiaotian Zhu, Peijiang Cao, Feng Rao. "Low-damage dry etching process of Sc-Sb-Te phase-change memory film using a chlorine-based reactive atmosphere." Applied Physics Letters (2025). https://doi.org/10.1063/5.0256478