Mello, D., Severino, A., Burresi, E., Anastasi, G., Piluso, N., Arena, M., Tapfer, L. (2025). Lattice recovery and microstructural defects in thermally annealed phosphorous and aluminum implanted (0001) 4H-SiC. Journal of Applied Physics. https://doi.org/10.1063/5.0250757