A. Lachowski, T. Remmele, A. Kwasniewski, C. Hartmann, M. Żak, J. Smalc-Koziorowska, M. Petkovic, M. Albrecht, T. Schulz. "Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles." Applied Physics Letters, 2026. doi:10.1063/5.0329728