Wei, C., Liao, K., Yao, Y., Wu, C., Chen, C., Yang, C., Hou, F., Luo, G., Wu, Y., Wu, Y. (2025). High- κ HfO2/ZrO2 superlattice for BEOL-compatible GAAFET memory device. Applied Physics Letters. https://doi.org/10.1063/5.0274127