Sánchez-Arriaga, N. E., Canzini, E., Espley-Plumb, N. J., Farnsworth, M., Pope, S., Leyland, A., Tiwari, A. (2025). Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance. Scientific Reports. https://doi.org/10.1038/s41598-025-23640-5