Wenzheng Li, Min Zhang, Yingdong Zhao, Riyao Cong, Runfeng Xu, Saihe Yang, Xiaofeng Gong, Daohan Wang, Jiangli Fan, Jun Zhao, Pengzhong Chen, Xiaojun Peng. "Electron‐Induced C─F Bond Activation in Sn 6 ‐oxo Cluster Resist for Enhanced Sensitivity and Sub‐10‐nm Patterning." Angewandte Chemie International Edition (2026). https://doi.org/10.1002/anie.7887240