Chae, B., Won, J. Y., Shin, Y. S., Yun, D. J., Ahn, J. M., Park, S. T., Lee, K., An, H., Seol, M., Ro, I., Kim, S., Chung, C., Lee, E. (2025). Direct observation of 3D nitrogen distribution in silicon-based dielectrics using atom probe tomography. Nature Communications. https://doi.org/10.1038/s41467-025-60732-2