Francesco Corazza, Emmanouil Kechaoglou, Leo Guery, Zhonghui Nie, Parikshit Phadke, Carl S. Lehmann, Roland Bliem, Peter M. Kraus. "Broadband extreme ultraviolet zeroth order scatterometry for nanostructure metrology." Nature Communications (2026). https://doi.org/10.1038/s41467-026-73052-w