Salcedo, G. A., Harrington, M., Nikodemski, S., Vasilyev, V., Newburger, M., Wolfe, T., Kabban, C. S., Sattler, J., Islam, A. (2025). A statistical study on the origin of the polarization-dependent leakage in ferroelectric aluminum scandium nitride films. Journal of Applied Physics. https://doi.org/10.1063/5.0279258