Luo, A., Guo, G., Li, Z., Zou, Z., Zhou, X., Chen, T., Zhang, L., Xu, G., Zeng, C., Zhang, X., Shi, W., Cai, Y., Long, S., Zeng, Z., Zhang, B. (2026). 214 MW/cm2 vertical β -Ga2O3 UMOSFETs enabled by HF sidewall treatment. Applied Physics Letters. https://doi.org/10.1063/5.0310882